The Zyvex dProber™, part of the NanoWorks® Tools
product line, is designed and optimized to electrically probe
sub-100nm features on semiconductor devices with increased
throughput and ease of use.
The system consists of a state-of-the-art, six positioner
Zyvex Nanomanipulator and XYZ sample stage, a parametric analyzer,
an advanced anti-contamination system, an industrial grade
load lock, and custom software to control and integrate each
component.
The dProber is a standard system mounted on a custom door
designed to replace the door of the customer’s Scanning
Electron Microscope (SEM) or Focused Ion Beam (FIB) System.
The dProber can be coupled with a new SEM/FIB or with an existing
SEM/FIB to reduce the total cost to the customer.
The system has six positioners with 5 nm resolution of movement.
The user manipulates the probes and positioners using a high
precision Hall Effect joystick. The software provides accurate
control by tuning the motors and joystick to each user’s
preference.
The center sample stage moves independently of the probes
in the XYZ directions for higher throughput and easier site-to-site
navigation. This greatly reduces the amount of probe movements
and consequently increases probe lifetime. The load lock is
mounted on the Zyvex door and is designed for quick transfer
of samples in an ultra-clean environment.
An easy-to-use Windows-based software platform seamlessly
integrates all of the components of the dProber. The software
also provides instant feedback to the user and a powerful
scripting engine.
The dProber’s electrical characterization system is
specifically designed for low-noise measurements. Our most
advanced anti-contamination system rigorously cleans the SEM/FIB,
enabling the user to achieve superior ohmic contact. The dProber
increases throughput and provides for more applications than
the usual four-positioner system.
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